Measuring Picometer Nanospositioner Resolution
نویسنده
چکیده
The article describes a new technique for measuring the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment such as laser interferometers. The resolution of a piezoelectric tube scanner is experimentally determined to be 1.4 nm, which agrees with previous results.
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تاریخ انتشار 2012